- ASM Lithography [IA][Direct] -
Specializes in photolithography with an installed base of more than 600 systems at customer sites around the world.
- FINLE Technologies, Inc [IA][Direct] -
Develops and markets the PROLITH family of lithography simulation tools.
- Raith GmbH [IA][Direct] -
SEM based electron-beam lithography for producing nanostructures, MMICs or masks. Defect review for precise location of known defects (Tencor, KLA).
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